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Electrotech al sputter vacuum chamber+cti cryo pump par
For Sale: Electrotech al sputter vacuum chamber+cti cryo pump par
Subject Electrotech al sputter vacuum chamber+cti cryo pump par
Ad is submitted by poster:
-We have 1000's of Industrial/Laboratory equipment & parts items-See the categories on the left below-
High Vacuum Sputter Chamber 26 x 9"+Cryo 8+loader +controls made by ElectroTech includes Inficon Quadrex 200 SCU Mass Spec
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* circular high vacuum aluminum sputter chamber
* Leybold Inficon Quadrex Residual Gas Analyzer
* control electronics & electricals
* load/locks & wafer cassette handlers
This is a vacuum chamber and directly associated parts used for vacuum sputter deposition of aluminum alloy metal. It was designed to go below 10-6 mt. It includes a CTI Cryo-Torr 8 Cryo Vacuum Pump and a CTI 350 CP cold head Cryogenic refrigerator. There is an air powered lift for raising the vacuum chamber lid. There are 3 ultra-high purity aluminum alloy sputter targets still in place. The outside of the chamber and lid is covered with heating elements to speed bake out of the chamber after cleaning and allow for hot deposition. The unit is still supported by its original frame.
The images that follow were taken of a sister unit that we stripped down and sold. While they are not of the unit you get, they should give you an excellent idea of what is hidden in what you are getting.
The label of the CRYO-TORR 8 CRYOPUMP is shown above.
There are still a couple of vacuum ion gauges with it.
The loading mechanism is shown above. Semiconductor wafers were loaded and unloaded from the vacuum chamber without opening the main chamber lid.
The CTI 350CP Cryogenic refrigerator sits on top the load mechansim as shown below.
The image above shows a Baratron pressure transducer.
The image below shows a couple of the heating elements on the lid of the chamber.
The motor in the image above drives rotation of a substrate platen inside the vacuum chamber.
The image above shows the lid lifted above the chamber. The circular parts are the ultra-high purity aluminum alloy sputter targets, actually what you see is the shielding the targets are hidden behind.
The image below is looking down into the vacuum chamber. If I can count right, the rotating platen held 14 substrates.
In the image above, you can see the slit the substrates were loaded and unloaded through.
In the image below, you are looking up at the underside of the vacuum chamber lid and the 3 sputter targets, a bake/heating station and an unused vacant station.
The sputter targets are about 9 inches diameter by 3 inches thick. Very little material has been sputtered off.
There is a shield shown in the image above and below.
The vacuum chamber is about 26" across and 9" deep.
The frame overall dimensions are about 64 by 50 by 67.5 inches tall.
CONDITION:Older used. Has sat for some number of years. Sold as Parts Only.
This might be just what you need
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